Description
High Vacuum Tube Furnace
Part #: PECVD-VTF1200D80
Ø Double shell structure for good surface cooling
Ø Furnace mounted on horizontal position with sliding trail
Ø Maximum temperature 1200 °C
Ø Continuous working (long term) temperature <1100 °C
Ø Programmable temperature control with 30 segments
Ø Temperature control +/-1.0 °C
Ø Two end vacuum flanges, fittings installed
Ø Heating zone length 440mm (Constant temperature zone 12inch)
Ø Heating elements 1200°C grade Al-Fe-Cr alloy
Ø Electricy, AC220V+/-10%, 50/60Hz, 15A
Ø One year Col-Int Tech limited warranty
Radio Frequency Plasm Generator and Controller
Part #: PECVD-PERF300
Ø RF power generator 5-300W output
Ø RF frequency 13.56MHz
Ø RF output port 50Ω N-type female connector
Ø Power supply AC208-240V 50/60Hz, 3A
Ø One year limited manufacturer warranty
Gas Mixer and Controller
Part #: PECVD-GM4A-SIERRA
Ø 4-channel gas mixer, mixing chamber SUS304
Ø Mass flow meter and controller by SIERRA®
Ø Gas channels 1: Ar 0~100 SCCM, 2: Hydrogen 0-200SCCM, 3: Methane 0-500 SCCM, 4: 0-500SCCM
Ø Max pressure 3 MPa
Ø Accuracy +/-1.5% FS, Linearity +/-0.5~1.5%
Ø Repeatability +/-0.2% FS
Ø One year limited warranty
Turbo-Molecular Vacuum Pump System
Part #: PECVD-TMVP30-PFEIFFER
Ø Pfeiffer® brand HiCube 30 KF40
Ø Forced air cooling
Ø Flange out Silencer G1/8
Ø Power AC100-240V, 2.0A, 170W
Ø Pump down time 5595S
Ø Gas displacement 22L/S
Ø Sound level <50dB(A)
Ø Digital vacuum gauge
Ø Ultimate pressure <10-7 hPa (7.5x10-8 Torr)
Ø One year limited warranty
Ø Shipping weight 20kg, product 12.5kg
PECVD Sliding Station and Cabinet System
Part #: PECVD-SSC1500
Ø Sliding station for 1500mm tube furnace
Ø Three cabinet support/frame system for PECVD
Ø Dimensions 72Wx24Lx30H inch
Ø Steel structure with surface powder coating
Ø Weight 300lbs
Ø One year Col-Int Tech limited warranty
Part #: PECVD-VTF1200D80
Ø Double shell structure for good surface cooling
Ø Furnace mounted on horizontal position with sliding trail
Ø Maximum temperature 1200 °C
Ø Continuous working (long term) temperature <1100 °C
Ø Programmable temperature control with 30 segments
Ø Temperature control +/-1.0 °C
Ø Two end vacuum flanges, fittings installed
Ø Heating zone length 440mm (Constant temperature zone 12inch)
Ø Heating elements 1200°C grade Al-Fe-Cr alloy
Ø Electricy, AC220V+/-10%, 50/60Hz, 15A
Ø One year Col-Int Tech limited warranty
Radio Frequency Plasm Generator and Controller
Part #: PECVD-PERF300
Ø RF power generator 5-300W output
Ø RF frequency 13.56MHz
Ø RF output port 50Ω N-type female connector
Ø Power supply AC208-240V 50/60Hz, 3A
Ø One year limited manufacturer warranty
Gas Mixer and Controller
Part #: PECVD-GM4A-SIERRA
Ø 4-channel gas mixer, mixing chamber SUS304
Ø Mass flow meter and controller by SIERRA®
Ø Gas channels 1: Ar 0~100 SCCM, 2: Hydrogen 0-200SCCM, 3: Methane 0-500 SCCM, 4: 0-500SCCM
Ø Max pressure 3 MPa
Ø Accuracy +/-1.5% FS, Linearity +/-0.5~1.5%
Ø Repeatability +/-0.2% FS
Ø One year limited warranty
Turbo-Molecular Vacuum Pump System
Part #: PECVD-TMVP30-PFEIFFER
Ø Pfeiffer® brand HiCube 30 KF40
Ø Forced air cooling
Ø Flange out Silencer G1/8
Ø Power AC100-240V, 2.0A, 170W
Ø Pump down time 5595S
Ø Gas displacement 22L/S
Ø Sound level <50dB(A)
Ø Digital vacuum gauge
Ø Ultimate pressure <10-7 hPa (7.5x10-8 Torr)
Ø One year limited warranty
Ø Shipping weight 20kg, product 12.5kg
PECVD Sliding Station and Cabinet System
Part #: PECVD-SSC1500
Ø Sliding station for 1500mm tube furnace
Ø Three cabinet support/frame system for PECVD
Ø Dimensions 72Wx24Lx30H inch
Ø Steel structure with surface powder coating
Ø Weight 300lbs
Ø One year Col-Int Tech limited warranty